[labnetwork] material issue diamond in LPCVD Nitride

[Daniel Christensen]

Greetings,

We have a student that wants to put ultra-nanocrystalline diamond 
into our LPCVD nitride tube.  This tube is used for mems and 
electronics processing.  We would like to know if anyone else has 
experience doing this or if you have any opinions on diamond in a nitride tube.

Thus far, our opinion is that is should be ok but we are not completely sure.

Thank you for your opinions.

Dan Christensen
Lab Manager
Wisconsin Center for Applied Microelectronics
http://www.engr.wisc.edu/centers/wcam/
University of Wisconsin-Madison