[labnetwork] Questions - Micro/Nano Fabrication text book

[Joel Pikarsky]

Hello Dr. May,

I apologize for the gross oversight!

Unfortunately I don't have a copy of your book yet.  Raghunath and I 
were wondering if you had any review copies available?! ;-)

Congratulations on your latest book, "Fundamentals of Semiconductor 
Manufacturing and Process Control"!

Joel Pikarsky
"Scourge of the Cleanroom"

Gary May wrote:
> Joel,
> 
> Don't forget
> 
> G. May and S. Sze, /Fundamentals of Semiconductor Fabrication/, New 
> York, NY: Wiley, 2003.
> 
> Regards,
> Gary May
> 
> At 10:08 AM 3/13/2007, you wrote:
>> Hello,
>>
>> IMNSHO, the best general, introductory text is  "The Science and
>> Engineering of Microelectronic Fabrication", 2nd edition, Stephen A.
>> Campbell.
>>
>> You may also want to consider "Fundamentals of Microfabrication: The
>> Science of Miniaturization", Second Edition, Marc J. Madou
>>
>> Make sure you use the second edition for either book.  I prefer
>> Campbell, it is more focused on the details of processing.  Madou has
>> more of a "general overview' flavor.
>>
>> Joel Pikarsky
>> "Scourge of the Cleanroom"
>>
>> Mike Berman wrote:
>> > Hello,
>> >
>> > I have 2 questions I would like some help with, first which text book
>> > is best (or very good) to use for a 200 or 300 level Micro/Nano
>> > Fabrication class?  The class would be "about" 2 hours a week in a
>> > class room and 3 hours in lab, for 16 weeks. The push would be for
>> > MEMS not transistors.
>> >
>> > Other question, do you have a good project (or link) to a project to
>> > be used for a one week summer class for high school teachers working
>> > in Micro/Nano?  It would need to be completed in about 12 hours of fab
>> > time.   The fab has a normal tool set, for dep, photo and etch, but
>> > not for transistors (doping is a problem).
>> >
>> > Thanks
>> >
>> > Michael Berman
>> > mberman at ece.arizona.edu
>> >
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>> >
>>
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> 
> Gary S. May, Ph.D.
> Professor and Steve W. Chaddick School Chair
> School of Electrical & Computer Engineering
> Georgia Institute of Technology
> Atlanta, GA 30332-0250
> Phone: 404-894-2902
> FAX: 404-894-4641
> E-mail: gary.may at ece.gatech.edu
>