[labnetwork] Aluminum Sputtering

[Pramod C. Karulkar]

(1) Sputter as very low pressures.  May help little bit. 
(2) Use ion beam deposition.  Entirely different technique.
(3) Modify your system to make it a quasi ion beam deposition system where
metal atoms are directed or channeled through a series of grids.  There was
a commercial system like this long time ago for filling deep via.  Problem
is you fill the grids to fast and have to clean them too often.  You don't
use all the Aluminum.  You cannot get enough throughput for any practical
use!
(4) There is a workaround.   You place a chimney around your deposition
path.  You can have it made at an air conditioning duct shop.  You can use
coffee cans.  Or you can use the large holiday popcorn cans.  Once you
figure out what works, you can make more permanent , fancy  chimney of steel
or aluminum.  
(5) Cheap way to avoid having to clean system is to use aluminum foil
(liners of suitable material) everywhere you can to protect from build-up.  

Hope it helps. 

Pramod C. Karulkar, Ph. D. 
President's Professor & Director
Office of Electronic Miniaturization
University of Alaska Fairbanks
3330 Industrial Avenue
Fairbanks, AK 99701
Office: 907 455 2008
Cell: 907 322 0225
Assistant : 907 455 2000
FAX 907 455 2019

-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of Joseph E. Palmer
Sent: Friday, October 26, 2007 12:40 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Aluminum Sputtering

Can anyone suggest any papers on sputtering aluminum?  I am looking at 
preventing the Al from depositing all over the chamber, as its light 
weight allows it to go much further than other metals.

Thanks,

Joe Palmer

Facilities Manager,
PRISM Micro/Nano Fabrication Laboratory
Princeton University

-- 
"Freedom should never be confused with license, nor tolerance with
acceptance." - Unknown



_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork