[labnetwork] Cadmium Telluride sputtering target exchange problems

[Keith Bradshaw]

We are getting a strong smell from the chamber and instant oxidation and
flaking of product deposited on the chimney of our Sputtering system when
changing the Cad-Tel target.

 

What is done to avoid this?

 

Is this smell harmful?

 

The flakes are very dark and seem to form when we open the system up to
atmosphere.  It is load locked so normally it doesn't see air.

 

Keith Bradshaw

972-883-2099

RL 10

University of Texas at Dallas Clean Room

NSERL building

 

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20090619/328770bc/attachment.html>