[labnetwork] information on Cressington 108 sputter coater

fred lacy fredlacy at engr.subr.edu
Fri Mar 6 10:56:08 EST 2009


Greetings.  Not sure if anyone can help me with this, but I have a
Cressington 108 sputtering machine and I need the following information:

 

   target voltage

   substrate bias (or voltage)

   substrate temperature

 

I checked the website http://www.cressington.com/spec_108.html , and I
could not find what I needed.  Any information that anyone can provide,
I would greatly appreciate it.  Thanks in advance.

 

Fred Lacy, Ph.D.

Associate Professor

Electrical Engineering Department

 

Southern University

College of Engineering

Pinchback Hall, Room 415

Baton Rouge, LA 70813

(225) 771-4094 [direct]

(225) 771-5292 [secretary]

(225) 775-9828 [fax]

 

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