[labnetwork] Help ... Please !!! ... our safety guys have not clue about gas cabinets ...
Leonidas E Ocola
ocola at anl.gov
Wed Dec 22 15:45:28 EST 2010
All,
Can anyone tell me if you shut the valves of the gas bottles in your
cleanroom
during winter break ? Our safety guys are under the impression that it is
hazardous to leave them open. They will only listen to me that they are
wrong
if other labs leave them as is.
(We have gas cabinets with gas alarms, shutoff valves, manifolds, etc. They
are hooked up to our RIE tool with 12 sticks for different gases)
I do not want to shut all the gas bottles for winter break because I
believe it is
unnecessary and in some cases could introduce air bubbles into the line
which could affect my RIE recipes if I do not flush the line.
If you can reply within the next few hours I would appreciate it.
Thanks
Leo
--
Leonidas E. Ocola, PhD
Nanofabrication Group
Center for Nanoscale Materials
Argonne National Laboratory
9700 South Cass Ave, Bldg 440, Rm A129
Argonne, IL 60439
Email: ocola at cnm.anl.gov
Phone: 630-252-6613
Fax : 630-252-5739
Web: nano.anl.gov
http://nano.anl.gov/docs/people/ocola.pdf
More information about the labnetwork
mailing list