[labnetwork] Quintel 7000 mask aligner and SVG 8800 Coater/Dev for sale

[steve scoggin]

Steve W. Scoggin
Master Scientific Research Technologist
University of Arkansas
College of Engineering
Office of the Dean
3189 Bell Engineering Center
Fayetteville, Ar 72701
Office 479-575-6049
cell   479-236-6049
Fax    479-575-5500
www.hidec.uark.edu/?section=people&content=person&person=scoggin



Greetings,

Available for sale is the attached and below described Quintel 7000  
mask aligner. The system is currently tooled for 100mm and 75mm round  
wafers, can be tooled up to 200mm wafers. The system is complete and  
in working condition. Also available is a SVG 8800 dual track  
coater/developer also complete working condition. Tools are located  
here in Fayetteville, Arkansas and available for inspection with notice.

Regards,


Steve W. Scoggin
Phone-479-236-6049











  QUINTEL 7000 AL Autoloader Mask Aligner, complete, operational>  
Wafer sizes from pieces 8" diameter or substrates up to 6'x6'>  
Currently tooled for 4' with 5x5 Mask Holder (Optional 3' with 4x4  
Mask> Plate)> Fully motorized X-Y-Theta alignment stage> Manual Tray  
load for substrateloading/unloading> CCTV Splitfield microscope with  
zoom> Has Optional Magna View (optical) splitfield / singlefield  
microscope with> Magna View CCTV for Microscope> Simple Topside Mask  
loading> UltraSense constant intensity UV power Supply> System set @  
200Watt can be set to 350 Watt> UV Collimation lens for  
improvedprinting resolution> Shock Isolation Table included as  
Standard> > Options:> Robotic auto load handling> Pulsed exposure  
timer sequencing> > Performance:> Print Modes: Soft, Pressure, Vacuum  
contact> Print Resolution: =<1.0microns> Alignment Stage:> Alignment  
Travel X-Y: Motorized with automatic re-centering> Alignment Travel  
Theta: Motorized with automatic re-centering> StageScan: +/- 19mm> X-Y  
Movement: +/-4mm> Theta RotationRange: +/-7 degrees> Mask / Wafer  
Separation: 0 - 300 microns> MaskSize: 2.5X2.5'up to 9x9 (optional  
mask plates required)> Topside Alignment Overlay: <0.5 microns>  
Bottomside Alignment Overlay: >2microns> Operator/process dependant> >  
UV LampHouse / UV Optics:> Lamphouse: 200/350 W (setup for 200)>  
ExposureOptics: UV (350-450 nm) standard> UV Uniformity: +/- 4% 150mm  
dia. / +/- 5% 200 mm dia.> > System Requirements:> Voltage: 240VAC  
50Hz> Compressed Air: 6.2-7.6 bar (90-110PSI)> Vacuum: -0.7 bar (21'  
Hg)> Nitrogen or CDA: 4.2 bar (60 PSI)> > System WxDxH:  
1194x838x1194mm (47'x33'x47')> Weight: 340kg (750lb)> Operational when  
de-installed> 1999 vintage.