[labnetwork] Lift-Off tool recommendations?

[Luciani, Vincent]

Hello Labnetwork,

I want to help our users with their lift-off processing.
I am seeking your thoughts and comments on an automated lift-tool.  There are hot solvent spray systems and batch immersion systems that work well in production environments where mask layout is optimized around a process.  As we all know, a user facility can bring extra challenges to such tools since not all mask layouts are optimized for success on a automatic lift-off tool.  Many folks simply rely on extended time solvent soaks.  Has anyone had success with a particular brand solvent spray tool in their lab or have you found success with a different approach to the problem?


Thanks,

Vincent K. Luciani
NanoFab manager
Center for Nanoscale Science and Technology<http://www.cnst.nist.gov/>
National Institute of Standards and Technology
100 Bureau Drive, MS 6201
Gaithersburg, MD 20899-6200 USA
+1-301-975-2886



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