[labnetwork] PECVD process advice/experience

[meng at eecs.berkeley.edu]

Hi Matthieu,

I use ECR PECVD system (made by Plasma Quest) to deposit oxide at room
temperature on polymer surfaces. Since it's microwave generated plasma,
the ion density is about 1000 times higher than RF plasma. So the
substrate doesn't need to be heated.

Thanks,

Xiaofan


> Hi all,
>
> First of all, happy new year to all of you and all the best for a
> prosperous year 2011.
>
> I have a user here wanting to deposit PECVD oxide @ 200C because she has a
> polymer exposed which Tg is 240C.
> Do any of you have experience/recommendations about such a low temperature
> PECVD process ?
> Putting a polymer in a PECVD chamber is not recommended I guess but hey we
> are a university lab and try to accommodate all of our users.
>
> Thanks
>
> Matthieu
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