[labnetwork] prospecting tools

[Xie, Ling]

We have had the Unaxis Shuttleline ICP system for III-V materials for ~6 years and satisfied with its performance and processes. 

Ling Xie, Ph. D
Principal Scientist
Center for Nanoscale Systems
Harvard University
11 Oxford St.
Cambridge, MA o2138
617-496-9069
lxie at cns.fas.harvard.edu


-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Matthieu Nannini, Dr.
Sent: Tuesday, July 05, 2011 12:14 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] prospecting tools

Dear labnetwork,

We are prospecting possible tools for our lab and I would like to have feedback and recommendations from the community about the followings:
- ALD
- ICP for III-V or Ga-based materials

thanks in advance

-----------------------------------
Matthieu Nannini
McGill Nanotools Microfab
Manager
t: 514 398 3310
c: 514 758 3311
f: 514 398 8434
http://miam2.physics.mcgill.ca/
------------------------------------


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