[labnetwork] Centura 5300 RF generators available

Vicky Diadiuk diadiuk at MIT.EDU
Wed Mar 16 15:42:49 EDT 2011


> Hi,
> We have 2 AMAT Centura 5300 RF generators avialable. Their specs are  
> as follows :
>
> AMAT ETO generator model 80-S03, fully automatic, water cooled, Dual  
> RF Generator from an AMAT 5300 HDP oxide etch system.
> Bias generator (2KW @ 1.8MHz continuous output)
> source generator (4KW @ 2.0MHz continuous output)
>
> 1 unit fully functional,
> 1 unit only bias generator is working
>
> Pls let me know if you have any interest in them
> Thx, Vicky





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