[labnetwork] on the deposition of copper indium diselenide

[Mark M Crain]

Hello Everyone,

We have just started some sputter deposition of copper indium
diselenide.  This deposition has started some questioning both its
safety and contamination.  I did the obvious before even purchasing the
target; reviewing the MSDS, speaking with target suppliers, and
"googling" the topic of CIS and CIGS deposition.

1) Earlier this week there were concerns regarding the smell coming
from the chamber after sputter deposition. I did have the opportunity to
smell this.  Is this harmful?  Would it be advisable to add some pump
and purge process to the venting sequence?

2)  There are claims of particulate in the chamber.  I have not seen
this yet but would be interested in comments regarding the use of a
target like this and its possible contamination to other deposition
processes.  The sources have lids so this material should be landing on
the lids and not the targets.  I can imagine that heated areas of the
chamber could off gas contamination.


Best Regards

Mark

Mark Crain
Cleanroom Manager
University of Louisville
SRB room 233
2210 South Brook Street
Louisville KY 40208
Phone 502/852-1572
Fax 502/852-8128
mark.crain at louisville.edu