[labnetwork] Sputtering of As2Se3 and RIE

Fri Oct 14 09:43:24 EDT 2011

Dear lab network,

I received a request for sputtering and RIE of chalcogenide glass out of a As2Se3 target. At first sight the As contamination worries me a lot. First it will contaminate the chamber then we will need to clean that taking all necessary precautions as per As.
Anyone as experience regarding those kind of processes ?

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Matthieu Nannini
McGill Nanotools Microfab
Manager
t: 514 398 3310
c: 514 758 3311
f: 514 398 8434
http://miam2.physics.mcgill.ca/
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