[labnetwork] Low temperature LPCVD Silicon

[Matthieu Nannini, Dr.]

Dear colleagues,

A researcher in the lab would like to run our poly tube as low as 400°C. He is using very dilute amounts of Silane in N2. At this temperature, I have concerns about unreacted silane in the pump. Our Ebara dry pumps are purged with filtered (2% O2) air and we never had any issue with them. 

Does anyone have experience running a poly tube that low ?

Thanks

Matthieu Nannini
McGill Nanotools Microfab
mnm.physics.mcgill.ca