[labnetwork] SVG track coaters

[Leif Johansen]

Dear all,

In our lab we have a 20 years old Semiconductor Systems Inc. (SSI) track coater which is on its last leg. I have noticed that quite a number of you are using Silicon Valley Group (SVG) coaters. We are presently considering if we should buy a refurbished SVG coater as a replacement tool. I therefore have a few questions:


·         What is our experience with their up-time?

·         How easy are they to service?

·         Is the cost of ownership large, medium or small?

·         Is it still possible to find companies which can provide spare parts and/or offer engineering services?

Best regards,

Leif

Leif S. Johansen

Head of Operations

DTU Danchip



Technical University of Denmark

[cid:image001.gif at 01CD8137.D8E6EF50]

Danchip

Ørsteds Plads, Byg. 347

2800  Lyngby

Direct +45 45255713
Mobile +45 25348992

lesjo at danchip.dtu.dk<mailto:lesjo at danchip.dtu.dk>

www.danchip.dtu.dk/<http://www.danchip.dtu.dk/>



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