[labnetwork] Cryopump configuration on a CVD tool

[Errol V. Porter]

Greetings members,

I wanted to see if there are any members currently using a cryopump on a CVD tool utilizing any of the following gases; germane, hydrogen, methane, silane, diborane or phosphine. Note the main pump being used during processing is a turbopump with the cryopump being used to keep the tool under vacuum while the tool is not being operated. If there are any users using  a similar configuration, how was the pump installed specifically to deal with the effluent that is released during a normal regeneration cycle.

Regards,

Errol Porter
University of Arkansas / HiDEC
700 W. Research Center Blvd
Fayetteville, AR 72701
Tel. 479 575-2519
Fax 479 575-2719
email: evporte at uark.edu<mailto:evporte at uark.edu>
http://www.hidec.uark.edu

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