[labnetwork] Anneal temp for aluminum on silicon with forming gas

Aebersold,Julia W. julia.aebersold at louisville.edu
Thu Nov 15 10:02:28 EST 2012


I wish to thank everyone for their very informative answers to my anneal questions.  We will use the information and integrate it with our anneal processes.

Cheers!

Julia Aebersold, Ph.D.
MNTC Cleanroom Manager
Shumaker Research Building, Room 233
2210 South Brook Street
University of Louisville
Louisville, KY  40292

502-852-1572
http://louisville.edu/micronano/


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