[labnetwork] TMAH controls or substitutes

[Morrison, Richard H., Jr.]

Hi,

At Draper Laboratory, whenever we are pouring any chemical with TMAH (no matter the %) we use full PPE, face mask, safety glasses, apron, arm covers, chemical gloves. This is the case for developer, as well as, Silicon etch solutions. After the chemical is in the tank/beaker in a chemical hood we relax the rules because the exposure risk is low, so it is safety glasses (with hood shield in place), chemical gloves and arm covers.

We try to minimize the use of TMAH for Silicon etching, but sometimes KOH does not work for our devices. We have restarted the use of EDP, but this comes with a list of dangers that can be worse than TMAH.

Hope this helps.

Rick


Draper Laboratory
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Linda Macks
Sent: Tuesday, September 04, 2012 2:07 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] TMAH controls or substitutes


Hi all,



We are currently reviewing our processes using TMAH, and I would be grateful for any feedback re. safety controls or substitute chemicals, particularly for Si etching involving 25% concentration TMAH.



Many thanks,



Linda




Dr Linda Macks
Facility Manager, ANFF-NSW
Australian National Fabrication Facility

School of Electrical Engineering & Telecommunications
University of New South Wales
UNSW Sydney NSW 2052
Australia

Phone: +61 (2) 9385 7845
Fax: +61(2) 9385 5114
Email: linda.macks at unsw.edu.au<mailto:linda.macks at unsw.edu.au>

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