[labnetwork] BCL3 - Gas Line Heaters and Protocols

[Dean Sutter]

Hello,

AT GT Nano we have a hard plumbed BCL3 line coming from a central gas 
room, running several hundred feet into the sub fab eventually 
connecting to the tools.

We have been internally debating the necessary protocols and physical 
installations necessary  to ensure a safe and properly functioning 
delivery mechanism.

These discussions have included the elimination of the central approach, 
replaced with a local gas cabinet and shorter runs since maintaining and 
being able to monitor line heaters on a several hundred foot of line, 
buried in plumbing up in the ceiling  is our primary concern.

So, we are seeking a benchmark from existing facilities that use BCL3.

Anyone care to volunteer to explain their installation and 
operating/safety protocols?

Thanks

-- 
Dean A. Sutter
Associate Director,
Research Operations and Industry Engagements

dean.sutter at ien.gatech.edu
404 894 3847 - Office
404 558 1844 - Cell
www.ien.gatech.edu