[labnetwork] N2 grade for blow guns
David A. Bunzow
dabunzow at lbl.gov
Mon Jan 14 09:59:51 EST 2013
Overkill? NO
Warranted: YES
David A. Bunzow
User Facilities Program Manager
The Molecular Foundry
Materials Science Division
Lawrence Berkeley National Laboratory
1 Cyclotron Road MS 67-3207
Berkeley, CA 94720
Office: 510-486-4574
FAX: 510-486-7424
Cell: 510-542-1747
On 1/12/2013 4:26 AM, Dennis Schweiger wrote:
> Iulian,
> good morning. We've always used UHP product for anything that touches the
> device surface (blow off guns, chamber venting, process gas, etc.). Utility
> N2 is used primarily for secondary purging, like pump purges.
> Dennis Schweiger
> Facilities Manager
> Lurie Nanofabrication Facility
> UofMichigan
> 734.647.2055 Ofc
>
> On Fri, Jan 11, 2013 at 11:40 AM, Iulian Codreanu <codreanu at udel.edu
> <mailto:codreanu at udel.edu>> wrote:
>
> Dear Colleagues,
>
> Would it be overkill or a good idea to supply high purity nitrogen
> (instead of utility nitrogen) to the blow guns located in cleanroom fume
> hoods?
>
> Thank you for your help.
>
> Iulian
>
> --
> iulian Codreanu, Ph.D.
> Director of Operations, UD Nanofab
> 149 Evans Hall
> Newark, DE 19716
> 302-831-2784 <tel:302-831-2784>
>
>
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