[labnetwork] LPCVD pumps

[Savitha P]

Hello!

We are using BUSCH COBRA BOB BA 100 model pumps with our LPCVD furnaces.
We have a lot of maintenance issues with the same, especially with the
silicon nitride and low temperature oxide processes. Is there anyone else
using these pumps for their LPCVD processes. If yes, could you please tell
us how you are maintaining it. Also, has anyone ever been replaced these
with similar capacity pumps from other companies?

Thanks and regards,

Savitha

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Dr.Savitha P
Facility Technology Manager
National Nanofabrication Centre
Centre for Nano Science and Engineering (CeNSE)
Indian Institute of Science
Bangalore - 560012
Ph: +91 80 2293 3254
www.nano.iisc.ernet.in

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