[labnetwork] Equipment Cleaning

[raghavan]

Hi

We have come across a Dry Ice cleaning service company (
http://www.coldjet.com/en/index.php ) recently. We have not tried it yet. I
am not sure if this method can be used for semiconductor tool parts.

Our Oxford PECVD tool vendor did recommend Dry Ice clean as one of the
chamber clean methods, though. 

I will post the results once we give it a try.

Best wishes

Raghavan

 

*************************************************

Dr.Vijayaraghavan

Technology Manager

National Nanofabrication Centre 

Centre for Nano Science and Engineering

Indian institute of Science ( IISc)

Bangalore - 560 012

India

Ph: 09663304316

***************************************************

 

 

 

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of John Shott
Sent: 10 September 2013 21:02
To: labnetwork at mtl.mit.edu; Morrison, Richard H., Jr.
Subject: Re: [labnetwork] Equipment Cleaning

 

Rick:

We are currently using two different companies ... one of them near you ...
for that service.  They are:

MK Recovery Group
100 Willow St.
North Andover, MA 01845
Phone: 1-978-688-0606
Fax: 1-978-975-8464

Pentagon Technologies 
21031 Alexander Ct, Hayward, CA 94545 

Phone:(510) 783-5050

MK Recovery Group in Andover, MA is our choice when we have metals that have
significant reclaim value (that is, gold, platinum, and friends).  While I
forget the exact algorithm, basically after reclaiming a certain amount of
the precious metal for their efforts, we are credited with the remaining
value of the metal.

When the metals on the parts are less valuable, we use Pentagon Technologies
here in California.

I hope this helps,

John



On 9/10/2013 3:31 AM, Morrison, Richard H., Jr. wrote: 

Hi everyone,

 

I am in need of a cleaning service for sputtering system and evaporation
system parts. I have a bead blast machine, but I would like to try to farm
this service out, have any of you used outside cleaning vendors for this?

 

Thanks in advance.

 

Rick

 


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