[labnetwork] 300 mm wafer coating capability

Lynn Rathbun rathbun at cnf.cornell.edu
Tue Apr 29 17:26:32 EDT 2014


Thomas

Cornell can, for at least some resists
Have them contact Mike Skvarla  607-254-4674 skvarla at cnf.cornell.edu 
to discuss requirements.

Lynn Rathbun



>I have a customer that's looking for coating (spin coating) 
>capability for 300mm wafers.
>
>Does anyone have a resource they could offer or recommend
>
>Best Regards
>
>
>Thomas S. Ferraguto
>ETIC Nanofabrication Laboratory Director
>University of Massachusetts Lowell
>1 University Avenue
>Lowell MA 01854-5120
>978-934-1809 land
>617-755-0910 mobile
>978-934-1014 fax
>[]
>
>
>
>
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>labnetwork at mtl.mit.edu
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**************************************************************
Dr. Lynn Rathbun                                        Rathbun at cnf.cornell.edu
NNIN  Deputy Director                   (607)-254-4872
CNF Laboratory Manager
Duffield Hall                                                (607)-255-8601 Fax
Cornell 
University                                       (607)-592-1549 Work Cell
Ithaca, New York 14853                     (607)-342-1880 Personal Cell




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