[labnetwork] 300 mm wafer coating capability
Lynn Rathbun
rathbun at cnf.cornell.edu
Tue Apr 29 17:26:32 EDT 2014
Thomas
Cornell can, for at least some resists
Have them contact Mike Skvarla 607-254-4674 skvarla at cnf.cornell.edu
to discuss requirements.
Lynn Rathbun
>I have a customer that's looking for coating (spin coating)
>capability for 300mm wafers.
>
>Does anyone have a resource they could offer or recommend
>
>Best Regards
>
>
>Thomas S. Ferraguto
>ETIC Nanofabrication Laboratory Director
>University of Massachusetts Lowell
>1 University Avenue
>Lowell MA 01854-5120
>978-934-1809 land
>617-755-0910 mobile
>978-934-1014 fax
>[]
>
>
>
>
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**************************************************************
Dr. Lynn Rathbun Rathbun at cnf.cornell.edu
NNIN Deputy Director (607)-254-4872
CNF Laboratory Manager
Duffield Hall (607)-255-8601 Fax
Cornell
University (607)-592-1549 Work Cell
Ithaca, New York 14853 (607)-342-1880 Personal Cell
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