[labnetwork] Testing toxic gas sensors

Savitha P savitha.p at ece.iisc.ernet.in
Fri Aug 1 01:26:23 EDT 2014



Dear Colleagues:

  We have  sensors for toxic gases like diborane, germane and phosphine in
our gas cabinets and deposition systems. We were wondering how to test
whether these are still working. Is there any proxy gases available which
can used.

Thanks and regards,

Savitha


-- 
Dr.Savitha P
Technology Manager
National Nanofabrication Centre
Centre for Nano Science and Engineering (CeNSE)
Indian Institute of Science
Bangalore - 560012
Ph: +91 80 2293 3254
www.cense.iisc.ernet.in



-- 
Dr.Savitha P
Technology Manager
National Nanofabrication Centre
Centre for Nano Science and Engineering (CeNSE)
Indian Institute of Science
Bangalore - 560012
Ph: +91 80 2293 3254
www.cense.iisc.ernet.in

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