[labnetwork] question about spin rinse dryer

[Bowser, Jerry]

Hello Xiaojin,

Here at NIST we have used Sitek Solutions and Modular Process for SemiTool parts.  Here is the contact info:

Sitek

Karen Henry

916-797-9000 x 17

khenry at sitekprocess.com<mailto:khenry at sitekprocess.com>

Micro Process
Charles Brown
cbrown at microprocesstech.com<mailto:cbrown at microprocesstech.com>

Hope this helps

Best,
Jerry Bowser
NIST
CNST NanoFab

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Wang,Xiaojin
Sent: Thursday, July 31, 2014 3:20 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] question about spin rinse dryer

Dear colleagues:

We have a spin rinse dryer from semitool that has been down lately. After I discussed with technical support several times, the problem boil down to the motor controller whose part number is 60710-27. The picture is attached. Does anyone know where to repair this part besides OEM? Or does anyone have an old working one that we can purchase? Thank you.

Xiaojin Wang
Senior micro/nano process engineer
Micro/nano technology center
University of Louisville


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