[labnetwork] And STS too… Re: Alcatel/Tegal DRIE support

[George P. Watson]

Hi Ian,

We use Hawks Technical Services for our STS etcher.  (215) 872-0944

Pat

PRISM Micro/Nano Fabrication Laboratory
Princeton University

-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Ian Harvey
Sent: Tuesday, August 12, 2014 5:14 PM
To: Matthieu Nannini
Cc: labnetwork at mtl.mit.edu
Subject: [labnetwork] And STS too… Re: Alcatel/Tegal DRIE support

Dear Mathieu and colleagues

We have the same question about STS...  Who do you call when you run out of troubleshooting ideas on a 2000-vintage STS DRIE?

Thanks,

—Ian

Utah Nanofab / University of Utah
Micron Technology Foundation Inc., Microscopy Suite Sorenson Molecular Biotechnology Building — A USTAR Innovation Center


On Aug 12, 2014, at 1:21 PM, Matthieu Nannini wrote:

Dear colleagues,

For those of you who own an Alcatel/Tegal DRIE, where do you get support from ? Our service guy (former Alcatel Eng. in France) is hard to get a hand on.

Thanks

Matthieu

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