[labnetwork] AGA 8108 RTP for sale

[Bernard Alamariu]

Hello,

We have a fully operational RTP machine for sale:
- AG Associates Heatpulse 8108
- Installed into a Class 10 clean room, and used for CMOS processing, only.

- Automatic 6" wafers handling.
- Gasses: N2, O2, N2O, NH3, Ar / MFC range : 20SLPM.
- Pyrometer temperature control: 400C - 1200C

The machine was professionally maintained; the service company info 
available.

Please let us know if you have an interest into this system.

Thanks, Bernard

Bernard Alamariu
Research Engineer
MTL - MIT
bernard at mtl.mit.edu
(617)253-8811
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