[labnetwork] Silicon wafer etch

[Morrison, Richard H., Jr.]

Hi Everyone,

We have a project here that needs  to wet etch a 150mm wafer from 50um to 10um thick. Do any of you have a wet tool that we could try to use to get this done. We are looking at a SSEC tool but our equipment budget is exhausted until next year and we need to get some wafers etched.

We want to use a Phosphoric/Nitric/HF mix.

Thanks in advance

Rick




Draper Laboratory
Principal  Member of the Technical Staff
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461

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