[labnetwork] TMB (trimethyl borate supplier source needed.

[Rob Vandusen]

Hi everyone.

I am hoping to find a supplier for TMB (trimethyl borate).

We currently use a small (500cc) container of liquid TMB for our boron
source on our LPCVD furnace for BPSG films.

Product name: Extrema, TMBE300SSN, BK500SSN (300 CC of 99.9999% TMB in a
BK500 SS container).

 

The last time I ordered this was over ten years ago now from Schumacher/Air
products. 

The minimum size container Air Products now sell  is a 19 liter - which is
way too big for our setup.

If I can't find a supplier I will have to look into alternative dopant
source.

 

Any leads or advice would be appreciated.

 

Thanks

Robert Vandusen
Technical Officer, Microfabrication Lab
Electronics Department
Carleton University
room: 4184 Mackenzie Building
613-520-5761
rvanduse at doe.carleton.ca 



 

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