[labnetwork] Precious metal targets: how to charge for and keep track of use

Tue Dec 23 11:46:01 EST 2014

Same here at McGill.

Coral registers the amount of nm deposited and charges it back to the user at a rate around 1.5CAD/nm.
Weighting before and after is too complex as Fouad mentioned.
Dealing with user-owned target or material is also something we don’T want to get into.

Matthieu

Le 2014-12-22 à 18:09, Fouad Karouta <fouad.karouta at anu.edu.au<mailto:fouad.karouta at anu.edu.au>> a écrit :

Hi Vito,

Here at ANU ANFF Labs we use the following rules with respect to precious metals:
1-      All targets (sputter) or precious metals (e-beam evaporator) are owned/purchased by the facility and are accessible to all users.
2-      We have calibrated the processes with respect to material usage in both equipment (sputter and e-beam evaporator) and we are charging Pt and Au in the sputter system
1 AUD/nm and in the e-beam evaporator we started at AUD 1.50/nm and recently reduced it to AUD 1.20/nm as we try to match the generated income from precious metals to their purchase. Btw our e-beam evaporator is a Temescal BJD-2000 with an extended chamber).

Some other facilities are weighing the precious metal before and after every usage and charging the effectively used precious metal. However this adds complexity of changing target that requires venting the sputter chamber. Also with a sputter system you end with an unusable part of the gold as it erodes unevenly and you end up with a significant amount of scrap.

Hope this is helpful,
Fouad Karouta
ANFF ACT Node Manager
ANU-Canberra-Australia

From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Vito Logiudice
Sent: Tuesday, 23 December 2014 1:43 AM
To: Labnetwork
Subject: [labnetwork] Precious metal targets: how to charge for and keep track of use

Dear Colleagues,

I would be curious to know your thoughts on the following questions regarding precious metal sputter targets:

1. Who pays for the initial purchase of the target: end user(s) or fab operations?

2. If the fab owns the target how do you keep track of the amount used per user?

3. If the user owns the target, is it installed/removed for each run? If it is kept in the chamber, how do you keep non-owners of the target from using it?

4. Any suggestions on how to minimize errors/abuses would be appreciated.

Thank you
Vito

--
Vito Logiudice  MASc, PEng
Director of Operations, Quantum NanoFab
University of Waterloo
Lazaridis QNC 1207
200 University Avenue West
Waterloo, ON           Canada N2L 3G1
Tel.: (519) 888-4567  ext. 38703
Email: vito.logiudice at uwaterloo.ca<mailto:vito.logiudice at uwaterloo.ca>
Website: https://fab.qnc.uwaterloo.ca<https://fab.qnc.uwaterloo.ca/>

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