[labnetwork] non-MOS LPCVD tube?

[Bill Flounders]

We offer most of our LPCVD processes in 2 separate tubes:
non-MOS restricted and MOS restricted.
We like to call them  clean and cleaner
instead of clean and dirty.

Though the term MOS is becoming less well defined
- the essence is active electronic devices requiring
highest quality gate oxides and best carrier mobilities
and lifetimes.

Low volatility metals and other non-standard
materials are approved on a case by case basis
in the non-MOS (clean) tubes. We have approved
Pt and W in our non-MOS silicon nitride tube.
Ti and Mo have also been approved in other
non-MOS deposition tubes.

Bill Flounders
UC Berkeley


Michael Khbeis wrote:
> Does anyone offer a tube for LPCVD nitride that can be used with Pt and Mo coated/exposed layers.  Customer is not worried about silicide formation.
>
>
> Dr. Michael Khbeis
> Acting Director, Washington Nanofabrication Facility (WNF) (formerly MFF)
> National Nanotechnology Infrastructure Network (NNIN)
> University of Washington
> Fluke Hall, Box 352143
> (O) 206.543.5101
> (F) 206.221.1681
> (C) 443.254.5192
> khbeis at uw.edu
> www.wnf.washington.edu/
>
>
>
>
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