[labnetwork] Heated gas lines

[Bob Henderson]

Matthieu:

It has been my recent experience depending on which gas and its vapor
pressure to locate the source bottle as close to your reactor gas inlet as
possible. Be sure to use the appropriate flow controller such as an MKS
1150C and heat tape the lines from your source bottle to the flowmeter and
the lines leading into your chamber for best results. You can also contact
Tom Britton who is a frequent contributor to this site as they are in this
business and know what they are talking about. Bob Henderson

-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of Matthieu Nannini
Sent: Thursday, July 03, 2014 11:22 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Heated gas lines

Dear colleagues,

We are undergoing an analysis of our gas network and I would like to get the
best practices out there.

For gases that need to be heated in order to avoid condensation, is it best
to have the cabinet as close as possible to the tool ? Or, if one wants to
consolidates all gases in the same area, could we have them far away ? if
yes, how do you address the condensation issue.

Thanks

--
-----------------------------------
Matthieu Nannini
McGill Nanotools Microfab

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