[labnetwork] question about spin rinse dryer

[Wang,Xiaojin]

Dear colleagues:

We have a spin rinse dryer from semitool that has been down lately. After I discussed with technical support several times, the problem boil down to the motor controller whose part number is 60710-27. The picture is attached. Does anyone know where to repair this part besides OEM? Or does anyone have an old working one that we can purchase? Thank you.

Xiaojin Wang
Senior micro/nano process engineer
Micro/nano technology center
University of Louisville


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