[labnetwork] Query regarding quartz tube cleaning station

[vanaparthy at ee.iitb.ac.in]

Hello,

We are planning to install a new quartz tube cleaning station / bench for
Furnace tubes in our lab at IIT Bombay. Do you have such tube cleaning
station at your facility. If yes or if you could let us know following:

Quartz tube cleaning requires HF & HNO3.

1. Does such tube cleaning require a clean room? or is semi-clean area is
also OK?

2.Is the Quartz tube cleaning station kept in the same room / area where
furnaces are there.

3.If furnaces are in different area, how do you transport quartz tubes
from Quartz tube cleaning station to furnace area.

The following are the process tubes at present in IITB:

A. Dry oxidation
B. Pyrogenic Oxidation
C. Nitride deposition
D. Poly Deposition (doped & undoped),
E. Solid source diffusion furnaces


-- 
Thanks & Regards,
V.RAJENDRA PRASAD
  Lab Manager,
  CEN,IITBNF, Electrical Engg Dept, Annexe,
  IIT Bombay, Mumbai, Powai- 400076
  Tel No.+91 9930621667