[labnetwork] e-beam deposition of cobalt

[Lubelski, David A]

Xiaojin,
We have been using Cobalt in an e-beam for about 5 years. When first heating, we do it in manual mode to slowly heat the material. After the first heating, use two rise/soak cycles and it works very well. We do use it in a system predominately used for magnetic materials, so we have no problems. If you would like our recipe, email me and I'll send it your way.
Dave Lubelski
Research Engineer
Birck Nanotechnology Center
Purdue University

Sent from my iPad

On Oct 23, 2014, at 11:56 AM, "xiaojin.wang at louisville.edu<mailto:xiaojin.wang at louisville.edu>" <xiaojin.wang at louisville.edu<mailto:xiaojin.wang at louisville.edu>> wrote:

Dear colleagues:

One user requests a cobalt deposition in e-beam. Have any of you done this before in your lab? Does it have any negative effect on the system? Thank you.

Best wishes
Xiaojin Wang
Senior process engineer
Micro/nano technology center
University of Louisville
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