[labnetwork] Paging system
Iulian Codreanu
codreanu at udel.edu
Tue Oct 28 16:30:00 EDT 2014
Thank you very much John! As usual, very useful information coming from
you!
iulian Codreanu, Ph.D.
Director of Operations, UD NanoFab
University of Delaware
Office: 163 ISE Lab
Mail to: 250N ISE Lab
Ship to: 165 ISE Lab
221 Academy Street
Newark, DE 19716
302-831-2784
On 10/28/2014 10:47 AM, John Shott wrote:
> Iulian:
>
> I've dug up our Sound Level Meter (the best that Radio Shack has to
> offer ...) and have made a few measurements to provide you with some
> example numbers. Note: my measurements were made using the dB(C)
> frequency compensation ... although I will give you a couple of
> references using dB(A) frequency compensation.
>
> In general, clean rooms are pretty noisy. Just the noise of the air
> handling equipment can be significant. In fact, about 3 years ago we
> dropped our mean vertical air velocity from about 90 to about 70 feet
> per minute. At the time, everyone commented on the fact that it was
> quieter in the clean room. That said, even with lower air velocities,
> I could only find one area of our lab that had a reading of less that
> 60 dB(C). That was the room in which our Raith 150 ebeam tool is
> located and it registered 53-55 db(C).
> The next two quietest rooms were an in-process measurement room (AFM
> and friends) coming in at about 60 db(C) and our gowning room at 61-62
> db(C) and there is essentially no noisy equipment in either of those
> rooms.
>
> Most areas of the lab with "real" process equipment in them registered
> in the range of 69-72 dB(C). Note: most, but not all, of our pumps
> actually live in the sub-fab. However, there are enough in-tool and
> near-tool pumps, fans, and other noise generators to increase sound
> levels significantly.
>
> The two loudest areas of our lab are near a bank of LPCVD tubes that
> have their pumps in the cabinet, rather than in the sub-fab. There we
> measured sound levels of 79-80 db(C). Even though the pumps for our
> AMAT Centura epi reactor are in the sub-fab, sound level readings near
> that tool are about 74-76 dB(C).
>
> Note: our sub-fab is quite noisy with peak readings of about 86 dB(C)
> near the big scrubbers with average readings down there of about 82-83
> dB(C).
>
> In areas dominated by equipment noise (which is most places in the
> clean room) and certainly in the sub-fab, I found that dB(A) readings
> were only about 2 dB lower than db(C) readings due to the fact, I
> suspect, that the noise of pumps and motors is dominated by
> higher-frequency components. In an area with less equipment noise,
> however, I found that dB(A) readings were about 5 dB lower that the
> dB(C) reading at that location.
>
> While I expect that there is significant variation from lab to lab in
> these numbers with, I suspect, newer labs being somewhat quieter, I
> think that it is reasonable to design for an average background sound
> level of about 70 dB(C) with some areas closer to equipment probably
> reaching as high as 80 dB(C).
>
> As a bit of corroborating evidence, I believe that the folks who had
> tried to do various forms of video training and collaboration have
> found that using headphones and a microphone produce more
> understandable communication than relying on "field microphones".
>
> Finally, we clearly did not spend much on our "sound level
> instrumentation package" ... in fact, while I haven't compared
> performance, I think that there are a collection of free apps for
> smart phones that are probably just as suitable for spot checks.
>
> Let me know if you have any further questions,
>
> John
>
> On 10/24/2014 10:41 AM, Iulian Codreanu wrote:
>> Dear Colleagues,
>>
>> I would like to not allow cell phone use in the Delaware cleanroom; I
>> recall a long thread on this forum with various opinions on this
>> topic. Since I would very much like for my customers to be in touch
>> with the outside world while in the cleanroom, I have been trying to
>> develop a paging system that would work with the VOIP phone system.
>>
>> The many pieces of the puzzle are coming together but I am struggling
>> answering a basic question posed by the "speaker guy": how noisy will
>> your cleanroom be? That's a tough one because I will not know for a
>> number of years until the cleanroom is filled with equipment.
>>
>> I would like to get an idea of how noisy fully operational cleanrooms
>> are (both the bay and chase areas). Would you please share your
>> knowledge?
>>
>> Thank you very much!
>>
>> Iulian
>>
>
>
>
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