[labnetwork] Litho Spinner

[Paolini, Steven]

Headway units have been around for ages and are quite good. They offer easy RPM calibration and adjustable ramp up time. The way to preserve them is to add an additional separator/filter on the vacuum line to keep resist out of the solenoid and instruct your users to NEVER use a chuck that's larger than the sample since the chuck vacuum will suck in whatever your coating with.
Good luck.
Steve Paolini   Equipment Dood
Harvard University Center for Nanoscale Systems.

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Olona, Leonard E.
Sent: Monday, September 08, 2014 1:58 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Litho Spinner

All,

We are looking for a new research sized litho resist spinner.   3" sized substrates max.

Headway Research offers a nice spinner for around $8K.   Any suggestions would be greatly appreciated.

Thank you,
-Len

Leonard E. Olona
Lab Manager, RIL<https://urldefense.proofpoint.com/v2/url?u=http-3A__arrc.ou.edu_ril.html&d=AAMFAg&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=R31Xcyrj0eecHQUAjK6Z4TW8FvPQ8bgSfyfZwMDwj_M&s=zKKzRFtS2KOggoMjXpTgtdXUEgY3oJya3F-pADrrL1Q&e=>
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