[labnetwork] Temperature Measurement Question

[Morrison, Richard H., Jr.]

Hi Everyone,

We currently use Sense-array wafers from KLA/Tencor to monitor hot plates and ovens. I have found 2 big draw backs with this;  #1 the T/C pop off and #2 the wafers break. Does anybody have a better solution of hot plate and oven mapping?

Thanks in advance for your help.

Rick


Draper Laboratory
Principal  Member of the Technical Staff
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20140922/c1f20e7f/attachment.html>