[labnetwork] LED lighting in cleanrooms/ litho

[Noah Clay]

Jean,

We have strip LEDs in our three litho spinner benches since last June.  The phosphor emission is broadband and there are stock yellow filters over the strips.  We have had no problems.

Thanks,
Noah

> On Apr 23, 2015, at 9:56 AM, Lapointe, Jean <Jean.Lapointe at nrc-cnrc.gc.ca> wrote:
> 
> Hello,
>  
> We are considering replacing our fluorescent lighting in the cleanrooms by LEDs.
> Does anyone have information about LEDs that would be best suited for this purpose? 
> Are LEDs being used in new fabs?
>  
> The litho room is one major concern. We currently use yellow fluorescents or regular fluorescents with yellow filters. 
> Have some commercial LEDs been tested for use in litho rooms with i-line resists (centered around 365 nm but some have some sensitivity up to 460nm)?
>  
> Thanks,
> Jean
>  
> Jean Lapointe
> Team lead, Fab2 eng.
> Information and Communications Technologies,
> National Research Council, Canada
>  
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