[labnetwork] Facility Process Vac

[Noah Clay]

Brian,

We use three Busch dry pumps (Virginia Beach, VA) for house vacuum, which are connected to a substantial ballast tank.

http://www.buschusa.com/products/product-portfolio/mink/info/ <http://www.buschusa.com/products/product-portfolio/mink/info/>

We’ve had zero issues with premature failure; they’ve been running continuously for over two years and we perform maintenance on them semi-annually.  Attached are a couple of photos of the house vacuum skid.

Best,
Noah Clay

Quattrone Nanofabrication Facility
University of Pennsylvania
Philadelphia, PA




> On Aug 12, 2015, at 12:53 AM, Bryant Colwill <colwib2 at rpi.edu> wrote:
> 
> Colleagues,
> 
> We are in need of repairing/replacing our cleanroom process vacuum pumps.
> Currently, we use a water sealed rotary vane system but it has been suggested to convert to a oil sealed rotary screw style pump.
> We target an ultimate vacuum of 28mmHg and our volume requirements, at point of use, are quite small (a couple spin chucks, end effectors, etc.).  Can anyone attest to having a rotary screw pump installed for this purpose that has withstood the test of time?  Any issues with premature/frequent bearing failure or replacement?  Also, does changing from water sealed to oil sealed set off any red flags? 
> 
> Thanks in advance,
> Bryant
> 
> Bryant Colwill 
> MNCR General Manager
> Rensselaer Polytechnic Institute 
> 110 8th Street, CII 6015 
> Troy, NY 12180 
> Ph: 518-276-3946 <tel:518-276-3946>  
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