[labnetwork] Cool grease used in DRIE

[Mariusz Martyniuk]

Fomblin oil or gallium.

Mariusz Martyniuk
-----------------------------
Associate Professor, ANFF-WA Managing Director
Microelectronics Research Group
School of Electrical, Electronic & Computer Engineering, Rm 4.17, M018
The University of Western Australia
35 Stirling Highway, Crawley WA 6009, Australia
Tel: +61 8 6488 1905<tel:+61%208%206488%201905>, Fax: +61 8 6488 1095<tel:+61%208%206488%201095>
Secretary Tel: +61 8 6488 3801<tel:+61%208%206488%203801>, Rm 1.73, http://mrg.ee.uwa.edu.au<http://mrg.ee.uwa.edu.au/>


-------- Original message --------
From: savitha.p at ece.iisc.ernet.in
Date: 15/08/2015 08:50 (GMT+08:00)
To: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Cool grease used in DRIE

Hi!

Currently we are using cool grease for sticking small samples to carrier
wafers for DRIE processing.Is there any other method that can be used,
instead of cool grease to stick small samples? We are finding it very
difficult to remove the cool grease.

Thanks and regards,

Savitha

___________________________________________________________

Dr.Savitha P,
Technology Manager
National Nanofabrication Centre,
Centre for Nanoscience and Engineering
Indian Institute of Science
Bangalore - 560012
India.
Ph: +91 80 2293 3254
www.cense.iisc.ernet.in<http://www.cense.iisc.ernet.in>

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