[labnetwork] Cool grease used in DRIE

[Bob Henderson]

Probably not. Bob Henderson

-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of sunanda.babu at cense.iisc.ernet.in
Sent: Tuesday, August 18, 2015 7:52 PM
Cc: 'Labnetwork'
Subject: Re: [labnetwork] Cool grease used in DRIE

But, do these methods work if cool grease or fomblin oil etc, needs to be
applied on the device side of the wafer or sample?


 Savitha:
>
>
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> A good method is to use a drop of Fomblin oil. Since it is very thin 
> it makes for a good thermal transfer mechanism. It cleans off well in 
> a soap called Simple Green and water. Bob Henderson
>
>
>
>
>
> From: labnetwork-bounces at mtl.mit.edu
> [mailto:labnetwork-bounces at mtl.mit.edu]
> On Behalf Of Mike Young
> Sent: Monday, August 17, 2015 1:49 PM
> To: Labnetwork
> Subject: Re: [labnetwork] Cool grease used in DRIE
>
>
>
> We used Mung II decades ago for mounting samples in a big old ion mill.
> Never really figured out what was in the stuff, but it worked:
>
>
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> http://www.intlvac.com/products/ion-beam-system-parts-accessories/ther
> mal-ma
> nagement/mung-thermal-paste
>
>
>
>
>
> On Aug 14, 2015, at 12:26 PM, savitha.p at ece.iisc.ernet.in wrote:
>
>
>
> Hi!
>
> Currently we are using cool grease for sticking small samples to 
> carrier wafers for DRIE processing.Is there any other method that can 
> be used, instead of cool grease to stick small samples? We are finding 
> it very difficult to remove the cool grease.
>
> Thanks and regards,
>
> Savitha
>
> ___________________________________________________________
>
> Dr.Savitha P,
> Technology Manager
> National Nanofabrication Centre,
> Centre for Nanoscience and Engineering Indian Institute of Science 
> Bangalore - 560012 India.
> Ph: +91 80 2293 3254
> www.cense.iisc.ernet.in
>
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> --
> Michael P. Young                                (574) 631-3268 (office)
> Nanofabrication Specialist                      (574) 631-4393 (fax)
> Department of Electrical Engineering            (765) 637-6302 (cell)
> University of Notre Dame                         mike.young at nd.edu
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