[labnetwork] Sputtering GeSbTe

[Iulian Codreanu]

Hello Everyone,

I have received a request for using GeSbTe in the sputtering system. I 
am not familiar with the material and any input is much appreciated:
-What potential contamination and/or toxicity issues should I consider 
and what mitigation strategies do you recommend?
-Assuming this material can be used in the system, would you recommend a 
starting recipe?

Thank you very much,

Iulian

-- 
iulian Codreanu, Ph.D.
Director of Operations, UD NanoFab
163 ISE Lab
221 Academy Street
Newark, DE 19716
302-831-2784
http://udnf.udel.edu