[labnetwork] HF vapor etch

[Christophe Clément]

Hi Richard

Here at Polytechnique Montreal, we have an Idonus HF vapor phase etcher.

Consult the tool at http://www.idonus.com/

Best

Christophe



Christophe Clément

Technicien laboratoire

Laboratoire de microfabrication (LMF)

Groupe des Couches Minces (GCM) www.gcmlab.ca

Ecole Polytechnique de Montréal  <http://www.polymtl.ca/> www.polymtl.ca

Département de génie physique

* 2900 Boulevard Edouard Monpetit

Pavillon JAB
Campus de l'Université de Montréal
Montréal (Québec) H3T 1J4


*  <mailto:christophe.clement at polymtl.ca> christophe.clement at polymtl.ca

* 514 340 4711

Fax : 514 340 4711 # 2417





De : Morrison, Richard H., Jr. [mailto:rmorrison at draper.com]
Envoyé : 3 décembre 2015 13:21
À : labnetwork at mtl.mit.edu
Objet : [labnetwork] HF vapor etch



Hi Folks,



I am  looking for a HF vapor release tool, I see that OAI and SPTS are the
2 manufactures out there, any recommendations or other suppliers?


thanks in advance



Rick





Draper

Principal  Member of the Technical Staff

Group Leader Microfabrication Operations

555 Technology Square

Cambridge Ma, 02139-3563



www.draper.com <http://www.draper.com>

rmorrison at draper.com <mailto:rmorrison at draper.com>

W 617-258-3420

C 508-930-3461



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