[labnetwork] Cambridge ALD Precursor Vendor

J Provine jprovine at stanford.edu
Thu Feb 12 08:53:03 EST 2015


In addition to strem you can use geleste and air liquids as alternatives.
J

On Thursday, February 12, 2015, Morrison, Richard H., Jr. <
rmorrison at draper.com> wrote:

>  HI,
>
>
>
> We use a company called STREM Chemicals they may be able to fill your
> cartridge.  Their contact email is sandy at strem.com
> <javascript:_e(%7B%7D,'cvml','sandy at strem.com');>
>
>
>
> Rick
>
>
>
>
>
> Draper Laboratory
>
> Principal  Member of the Technical Staff
>
> Group Leader Microfabrication Operations
>
> 555 Technology Square
>
> Cambridge Ma, 02139-3563
>
>
>
> www.draper.com
>
> rmorrison at draper.com
> <javascript:_e(%7B%7D,'cvml','rmorrison at draper.com');>
>
> W 617-258-3420
>
> C 508-930-3461
>
>
>
>
>
>
>
>
>
> *From:* labnetwork-bounces at mtl.mit.edu
> <javascript:_e(%7B%7D,'cvml','labnetwork-bounces at mtl.mit.edu');> [mailto:
> labnetwork-bounces at mtl.mit.edu
> <javascript:_e(%7B%7D,'cvml','labnetwork-bounces at mtl.mit.edu');>] *On
> Behalf Of *Mark Heiden
> *Sent:* Wednesday, February 11, 2015 6:12 PM
> *To:* labnetwork at mtl.mit.edu
> <javascript:_e(%7B%7D,'cvml','labnetwork at mtl.mit.edu');>
> *Subject:* [labnetwork] Cambridge ALD Precursor Vendor
>
>
>
> Has anyone found an alternate vendor for precursors packaged for Cambridge
> Labs ALD systems besides Sigma Aldrich?
>
>
>
> We currently have a delivery date for a standard aluminum (TMAH) cartridge
> that is in June 2015. Not acceptable..
>
>
>
> Thanks in advance,
>
>
>
>
>
> Mark Heiden
>
> NanoFab Cleanroom Manager
>
> Center for Nanoscale Science and Engineering
>
> University of California, Riverside
>
> 951-827-2551
>
>
>
>
>  ------------------------------
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