[labnetwork] Silane quantity

[Vito Logiudice]

Hi Matthieu,

We've got one cylinder of 5% silane (balance N2) (AL size 16, approx 16L
internal water volume) and one cylinder of 100% silane (AL size 44, approx
44L internal water volume).

The 5% silane is used for PECVD depositions and at our rate of
consumption, it usually gets replaced before empty, typically at or near
its expiry date.

We haven't yet gained any experience with silane consumption but I suspect
the cylinder will expire before the entire volume gets consumed.

Cheers,
Vito
--
Vito Logiudice  MASc, PEng
Director of Operations, Quantum NanoFab
University of Waterloo
Lazaridis QNC 1207
200 University Avenue West
Waterloo, ON           Canada N2L 3G1
Tel.: (519) 888-4567  ext. 38703
Email: vito.logiudice at uwaterloo.ca
Website: https://fab.qnc.uwaterloo.ca





-----Original Message-----
From: "<Matthieu Nannini>", Matthieu Nannini <matthieu.nannini at mcgill.ca>
Date: Tuesday, 6 January, 2015 4:30 PM
To: "Labnetwork ?[labnetwork at mtl.mit.edu]?" <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Silane quantity

>Dear colleagues,
>
>first of all, happy new year to all of you ! May the force be with you
>all ! 
>
>My EHS dept. would like to compare quantity of silane on site in
>different labs. So, if you can spare 30s to answer those 2 questions then
>you can go chasing the student that left the evaporator at atmosphere
>during christmas:
>- how much silane do you use yearly ?
>- what is the cylinder volume you have ?
>
>cheers
>
>Matthieu
>McGill Nanotools
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