[labnetwork] Printer for Photolithography Masks

[Loïk Gence]

Dear All,

Recently I tried to produce masks for UV litho, with the printers available (only laser) in our lab. 
Just by looking with a simple optical microscope, one sees the pinholes you are talking about... 

What are the requirements (resolution,...) of ink-jet printers for enabling the production of masks can you advice any model? what were the   smallest features obtained ? 
I thank you for your comments.

Best,
Loïk. 

Dr. Loïk Gence
LABSEM – PUC-RIO
End Rua Marques de São Vicente, 225-Gávea
CEP:22451-900 – Rio de Janeiro, RJ-Brasil
     (Telefone)      +55 (021) 3527-2193
             loik.gence at cetuc.puc-rio.br

> Le 07/01/2015 à 15:37, Luciani, Vincent <Vincent.Luciani at nist.gov> a écrit :
> 
> I’m so glad this past experience has finally been called upon, it justifies the time I spent on it years ago.  I have made many many masks from transparencies and have found that inkjets set for transparencies with saturation and ink volume set to high make very nice masks with no pinholes.  Just give them an extra minute to dry before you touch them.
>  
> Inkjets work better than laser printers for two reasons.  Laser print, even though it looks nice to the eye is filled with very small pinholes which contact lithography will reproduce.  Inkjet ink flows to make a solidly opaque feature.
> Another key difference is that, if you look at a laser jet transparency film. It is foggy.  It takes way too much overexposing for this not to leave tiny resist dots (assuming pos. resist).  Whereas if you look at an inkjet transparency film, it is clear as glass.
>  
> Draw a circle around the pattern slightly larger than the wafer or piece so you can line up the mask, cut the transparency down to the size of a clear mask plate, tape it on and expose with the transparency in direct contact.  Reverse the image before you print the transparency and you can put the ink in direct contact for maximum resolution.  Have fun and good luck!
>  
>  
> Vince
>  
>  
> Vincent K. Luciani
> NanoFab Manager
> Center for Nanoscale Science and Technology
> National Institute of Standards and Technology
> 100 Bureau Drive, MS 6201
> Gaithersburg, MD 20899-6200 USA
> +1-301-975-2886
>  
>  
>  
>  
>  
> From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Jacob Trevino
> Sent: Wednesday, January 07, 2015 1:51 PM
> To: labnetwork at mtl.mit.edu
> Subject: [labnetwork] Printer for Photolithography Masks
>  
> Happy New Year All,
>  
> Does anyone have any recommendations for specs on a printer to be used for quick and easy (lower resolution) photolithography masks. These would be printed on transparencies to be used with a blank glass plates and standard contact lithography.  Laser jet verses ink jet? Resolution in both techniques these days seems impressively high and sufficient, but maybe there are advantages to one vs the other. Any input would be greatly appreciated. 
>  
> Best regards,
> Jacob
>  
>  
> -------------------------------- 
> Jacob Trevino, PhD
> NanoFabrication Facility Director
> The City University of New York (CUNY)
> Advanced Science Research Center (ASRC)
> Tel.  (646) 664-9468
> Cel.  (646) 629-1179
> Email: Jacob.Trevino at asrc.cuny.edu
> Web: http://asrc.cuny.edu/ 
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