[labnetwork] Heidelberg DWL2000 owner

[Garry J. Bordonaro]

We have owned one of these tools for almost 5 years.  We have also owned a
DWL66, and a DWL66fs, the latter of which we still have.  The 2000 has been
giving us very good results.  We have seen a few problems with the solid
state laser with age, but it generally has been a good tool.  We can write
any mask we need in ~2 hours max using the nominal 0.7um write head.  There
are iso/dense bias issues, particularly with smaller features, but that is
expected.  Precision and accuracy of the stage are very good. 



Garry J. Bordonaro
Microlithographic Engineer
Cornell NanoScale Facility
250 Duffield Hall
Cornell University
Ithaca, NY  14853-2700
(607) 254-4936
bordonaro at cnf.cornell.edu
http://www.cnf.cornell.edu/





-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of CHUNG Wing Leong
Sent: Wednesday, January 28, 2015 4:51 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Heidelberg DWL2000 owner

Dear all,

My name is Jeff Chung, Engineer of NFF of HKUST. We are writing a proposal
to acquire a Heidelberg DWL2000 for mask making. Is there any tool owner
here? and can give me some recommendation of this machine or other
alternative?

Best Regards
Jeff Chung





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