[labnetwork] LN2 vs N2 generation on site

[Morrison, Richard H., Jr.]

Hi everyone,

I am paying >$220K per year for LN2 to generate Nitrogen for my fab. Have any of you guys switched to onsite Nitrogen generator?

Looking for ideas on:
Cost of system
Maintenance cost of system
 Quality of the Nitrogen.
Operating cost per CuFt of Nitrogen

Rick


Draper Laboratory
Principal  Member of the Technical Staff
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461

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