[labnetwork] Suggestions for interlocking mask aligners

[Vito Logiudice]

Shiva,

Of course. I will ask the experts on my team to describe the method they plan to use and report back. We have not yet interlocked our sputter but the mouse has been interlocked on other tools.

Vito

From: Shivakumar Bhaskaran <sbhas at uchicago.edu<mailto:sbhas at uchicago.edu>>
Date: Wednesday, October 28, 2015 at 1:48 PM
To: Vito Logiudice <vito.logiudice at uwaterloo.ca<mailto:vito.logiudice at uwaterloo.ca>>
Cc: "labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>" <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: RE: Suggestions for interlocking mask aligners

Vito,

I like this idea of interlocking the track ball of the mouse. Is it possible to tell me how you wired it so that I can try on the sputtering system. Atleast I have something to start with rather than not having any interlock.

-Thanks
-Shiva

Shivakumar Bhaskaran, Ph.D.
Searle CleanRoom Manager
The University of Chicago
5735 S.Ellis, Room 032
Chicago-60637
Ph:773-795-2297
https://searle-cleanroom.uchicago.edu/

From: Vito Logiudice [mailto:vito.logiudice at uwaterloo.ca]
Sent: Wednesday, October 28, 2015 12:41 PM
To: Shivakumar Bhaskaran <sbhas at uchicago.edu<mailto:sbhas at uchicago.edu>>
Cc: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: Re: Suggestions for interlocking mask aligners

Hello Shiva,

Apologies, I misunderstood your first email.

We have a sputter system which also runs its operating software on a laptop. As an initial simple approach we plan to interlock this particular system by interlocking the computer track ball  which is connected to the laptop and disabling the laptop’s trackpad via its configuration settings page. Some on this forum have already mentioned that disabling a computer mouse is not the best interlocking approach since users can easily bypass the system by bringing in their own mouse. This makes sense and I think many of us on this forum have likely come across such "resourceful” individuals in the past. Nonetheless, we plan to start with this approach for now and see how it goes before exploring other options.

I look forward to hearing what others in the community might suggest to help you out.

Best regards,
Vito

From: Shivakumar Bhaskaran <sbhas at uchicago.edu<mailto:sbhas at uchicago.edu>>
Date: Wednesday, October 28, 2015 at 1:06 PM
To: Vito Logiudice <vito.logiudice at uwaterloo.ca<mailto:vito.logiudice at uwaterloo.ca>>
Cc: "labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>" <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: RE: Suggestions for interlocking mask aligners

Hello Vito,

Sorry I should have mentioned more clearly. For example one of my tool I am planning to turn off/on the computer screen using the relay.

But for laptop I cant turn off/on the screen using relay or activate the screen using relay. May be I am wrong,
I checked with outside vendor regarding this but he mentioned it can be done, but it involves quite an effort to be done, there is also code to just turn off/on the laptop screen, but I couldn’t find with the relay.

-Thanks
-Shiva

Shivakumar Bhaskaran, Ph.D.
Searle CleanRoom Manager
The University of Chicago
5735 S.Ellis, Room 032
Chicago-60637
Ph:773-795-2297
https://searle-cleanroom.uchicago.edu/

From: Vito Logiudice [mailto:vito.logiudice at uwaterloo.ca]
Sent: Wednesday, October 28, 2015 11:52 AM
To: Shivakumar Bhaskaran <sbhas at uchicago.edu<mailto:sbhas at uchicago.edu>>
Cc: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: Re: Suggestions for interlocking mask aligners

Hello Shiva,

If I’m not mistaken some laptops can be configured to remain active even when the monitor is folded over to the closed position. In this position the monitor will turn off but the CPU will remain in operation which I think would solve your problem. Perhaps you can have someone in your local IT department have a look at your particular laptops to see if they can be configured this way.

Best regards,
Vito

From: Shivakumar Bhaskaran <sbhas at uchicago.edu<mailto:sbhas at uchicago.edu>>
Date: Wednesday, October 28, 2015 at 12:30 PM
To: Leif Johansen <lej at danchip.dtu.dk<mailto:lej at danchip.dtu.dk>>, Vito Logiudice <vito.logiudice at uwaterloo.ca<mailto:vito.logiudice at uwaterloo.ca>>, "labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>" <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: RE: Suggestions for interlocking mask aligners

Hello All,

Since you all are exchanging emails regarding the interlock, I myself planning to do in my facility. I was able to figure out for some of the tool that I have. But two of my tool is hooked up to laptop, if I shutdown the laptop or close the lid of the laptop the software stops working and then the vacuum valve or heater shuts off which I don’t want to have like this. I don’t want to add computer screen or load the software in desktop due to space constraint.

The two tools that I am having are one is Arradiance Gemstar ALD and another is PE 100 O2 plasma etch. I don’t want to pump to be turned off/on using relay, because I want the system to in vacuum even if its not in use.

-Thanks
-Shiva

Shivakumar Bhaskaran, Ph.D.
Searle CleanRoom Manager
The University of Chicago
5735 S.Ellis, Room 032
Chicago-60637
Ph:773-795-2297
https://searle-cleanroom.uchicago.edu/

From:labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Leif Johansen
Sent: Wednesday, October 28, 2015 9:47 AM
To: 'Vito Logiudice' <vito.logiudice at uwaterloo.ca<mailto:vito.logiudice at uwaterloo.ca>>; labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Suggestions for interlocking mask aligners

Hello Vito,

At DTU Danchip we have two MA-6 aligners. On both tools we have interlocked the electrical signal for the solenoid controlling the CDA for the shutter. It works fine. If you want, we can mail you some pictures of how we did it.

Of course, if a user really wanted to cheat, he or she could perform all work before the exposure (i.e. mask load, wafer load and alignment) without logging in, and then only log in during exposure. In reality, we do not see such misuse.

Best regards,

Leif


From:labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Vito Logiudice
Sent: 26. oktober 2015 21:43
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] Suggestions for interlocking mask aligners

Dear Colleagues,

I would appreciate hearing how you may have interlocked the mask aligners in your respective facilities. In our particular case we have a Suss-Microtec MA6 aligner and we are struggling to identify a parameter that can be interlocked without causing the system additional wear and tear. Any insights would be appreciated. Thank you.

Best regards,
Vito
--
Vito Logiudice  P.Eng.
Director of Operations, Quantum NanoFab
University of Waterloo
Lazaridis QNC 1207
200 University Avenue West
Waterloo, ON           Canada N2L 3G1
Tel.: (519) 888-4567  ext. 38703
Email: vito.logiudice at uwaterloo.ca<mailto:vito.logiudice at uwaterloo.ca>
Website: https://fab.qnc.uwaterloo.ca

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